Basis for revised IDLH: The revised IDLH for boron trifluoride is 25 ppm based on subchronic inhalation toxicity data in animals [Rusch et al. 0000076224 00000 n Cincinnati, Ohio : ACGIH. 0000006540 00000 n Atomic layer etch and pulsed plasma etch. 3.5 TLV-STEL: Not listed. 0000003028 00000 n 3), boron tribromide (TLV-Ceiling = 10 mg/m. 76 0 obj <>stream BORON TRICHLORIDE Class: 2.3(8) Packaging group: N/A Labels: 2.3(TOXIC) AND 8(CORROSIVE) Remarks open all close all. 0000038286 00000 n Use process enclosures, local exhaust ventilation or other engineering controls to keep worker exposure to airborne contaminants below any recommended or statutory limits. %PDF-1.4 %���� 3.4 TLV-TWA: Not listed. SpecialProvisions open all close all. RID-TRAPPER . UBE RID . For Boron trifluoride, the BOD adopted the ACGIH TLV of 0.1 ppm (8-hour exposure limit), but maintained the existing exposure limit of 1 ppm (Ceiling Limit) as BC ELs due to sampling issues. 0000016905 00000 n Boron fluoride, Trifluoroborane CAS No. �"231��p2 p�p8�2HiZ7�a\Ü�.n��큕���%�#��� 2�LLL�'9���Txl��`�����)�?y�#ρ43�b E ۪ @Z���j((|�H � �> endobj 41 0 obj <>/Encoding<>>>>> endobj 42 0 obj <>/ColorSpace<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageI]>>/Type/Page>> endobj 43 0 obj <>stream 0000012184 00000 n PubChem Substance ID 24854843. 0000002876 00000 n %PDF-1.6 %���� 0000008156 00000 n Bromine Br 2 159.8 0.1 0.2 0.3 3 TZS 751 vii. Publication #0100Doc. �&���ֵ`ǂP׬��ZXص몬"��(�ˢ+d���33!�������/����2�����>�\�BjB�9cŲ�����{^DH�0{�o���!Ʉ���\�j��:� 0000003003 00000 n Vomitus generally has a … Emergency Overview 3. H��UMo�0��W�� �J���0��v�!�B�b�3l��#%;I[gݖ���G=>>Q UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires. H331 Toxic if inhaled. 0 American Conference of Governmental Industrial Hygienists, «Boron Trichloride (CAS 10294-34-5).» In: Documentation of the threshold limit values and biological exposure indices / Documentation of TLV's and BEI's. In case of fire in the surroundings, use appropriate extinguishing media. Q����Q��'��L+Tl�j�]}�ï���>u߄�X�M=�m�X>�����%�) endobj 6 0 obj <>stream It is also used in the refining of aluminium, magnesium, zinc, and copper alloys to remove nitrides, carbides, and oxides from molten metal. 0000001461 00000 n x�]��j�0F���l/���l���B.����8��5ll�8y���oڅ �p�g4G#OQ�w��_����’�����u��mȏ�������E ���LYc��.��4�Vŏ�t]��æ���6wa��ï��Xn��'\°���uN1��f��\B���}�����?_�y�B.`�ڱשi��琭��o��^ga��[��Q�S������ �@y�`T����J��7B��t��W��^/� �&l������P�Ƽ���Ȏ �%�G����c9>V>ª |*��x�c�S*���|,5� ���>ڔ >^c�SU �O��B>�|��%�qL-���|�U|,[/����>�|J]�O� �cy�K��I�},�O�҇�,|},|J���q,�§T��c�-�Cm� ��6�7�����(��1�ч��ۆ}$]��7-%�����೥����f9����F��(��i~?����$�O>̈́4�>�M���9��4�0b�p��9��q�cP��}�2� 0000039019 00000 n NACRES NA.22 0000003655 00000 n 0000038525 00000 n <<6A1A5510015C1240B3086346058393D6>]>> 0000001056 00000 n Repeated exposure of skin to vapours may result in dermatitis. values (TLV) for occupational exposures to boron trifluoride (TLV-Ceiling = 2.8 mg/m. ���O9�v՘�#��Qk�z����R��z�ħ���0�ԨF, Boron trichloride appears as a colorless gas with a pungent odor. 3. as inhalable particulate). Boron Trichloride: TLV(R) Chemical Substances 7th Edition Documentation ACGIH(R) Format: Electronic (digital download/no shipping) Member - $48.00 NonMember - $60.00 Org Supporter - $0.00 + Add to Cart. Under prolonged exposure to fire or intense heat, the containers may rupture violently and rocket. 0000014413 00000 n startxref TLV-TWA (ACGIH) LD50 (Species & Routes) INGREDIENTS CAS NUMBER % (VOL) LC50 (Rat, 4 hrs.) Oral, esophageal, and stomach burns are common. Boron trichloride as a selective demethylating agent for hindered ethers . �. threshold limit value (tlv) the amount of a gas/fumes exposure for 8 hours a day for 5 days a week without any harmful effects. 0000016776 00000 n endstream Causes eye, skin, and respiratory tract burns. xڤ�|TU�?~ι����5��Lf2� %�U�J�$��� Gives off irritating or toxic fumes (or gases) in a fire. trailer We offer boron trichloride in a variety of purities and concentrations. 1008 125. 39 0 obj <> endobj 0000005215 00000 n 0000009952 00000 n Signs and Symptoms of Acute Boron Trichloride Exposure: Signs and symptoms of acute ingestion of boron trichloride may be severe and include salivation, intense thirst, difficulty in swallowing, chills, pain, and shock. Boron trichloride has been found to be an efficient reagent for the selective cleavage of sterically hindered methoxy groups in methoxyarenes; the scope and utility of this reaction are explored. 3.5 ... Boron trichloride BCl 3 117.2 3 - 3 25 *** v. Boron trifluoride BF 3 67.8 1 1 1 25 *** vi. It is toxic by inhalation. Description: Each 7th Edition Documentation summarizes and evaluates the scientific data from which its TLV ® or BEI ® is derived. 3), and inorganic borates (TLV-TWA = 2 mg/m. 0000016647 00000 n Boron trichloride is a boron halide. About. BORON TRIBROMIDE BORON TRICHLORIDE BORON TRIFLUORIDE SEC-BUTYL ACETATE TERT-BUTYL ACETATE CALCIUM SILICATE, naturally occurring as WOLLASTONITE CALCIUM SILICATE, synthetic nonfibrous CYANOGEN HARD METALS, containing COBALT and TUNGSTEN CARBIDE as Co ISOBUTYL ACETATE PROPOXUR SIMAZINE TOLUENE DIISOCYANATE, 2,4- and 2,6- as a mixture … 0000002109 00000 n 39 38 MDL number MFCD00013208. 0000001540 00000 n C: 0.7 ppm Section 8. PRODUCT NAME : CONCENTRATION Boron Trichloride: >99% At Praxair, we develop the right grades for the right applications. 0000068547 00000 n 3.6 TLV-Ceiling: Not listed. DOT ID & Guide. 0000000016 00000 n 0000008891 00000 n BCl 3. %%EOF Exposure controls/personal protection Ingredient name Exposure limits Appropriate engineering controls:Use only with adequate ventilation. 3), boron oxide (TLV-TWA = 10 mg/m. It compiles information from several government agencies and organizations. 0000038768 00000 n 0000075589 00000 n BCl₃ Product information Characteristics Physical data Product specification Shipping information BCl₃ is the main gas composition in High-K and metal anisotropic plasma etch. H314 Causes severe skin burns and eye damage. Hazards Identification Toxic, corrosive liquid and gas under pressure. Corrosive to metals and tissue and is toxic. !� ���Κ>�nBk��o�΅�Jŋ�ua�x��e+/Z�. Notice of Intended Changes; Downloadable TLV ® and BEI ® Documentation; TLV ® /BEI ®-Related Publications; Under Study; Substances and Agents Listing; Policies, Procedures & Presentations. Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. Christopher F. Carvalho and Melvyn V. Sargent Abstract. Boron trifluoride (7637-07-2) ACGIH ACGIH TLV-TWA (ppm) 0.1 ppm ACGIH ACGIH TLV-C (ppm) 0.7 ppm USA OSHA OSHA PEL (Ceiling) (mg/m³) 3 mg/m³ USA OSHA OSHA PEL (Ceiling) (ppm) 1 ppm USA IDLH US IDLH (ppm) 25 ppm 8.2. 0000005884 00000 n B Boron trichloride assisted reaction between acid chlorides and alkynyltrifluoroborate salts have been reported to form ynones. �o�-ӥ4^8���j+� �D_g��*3���'�V�%pd5 �%҈]���FJ��`N%K��4�/X�DwԎ(%p��o(��P��'8����вt��F�QpU���.c��h�6� �ͱd�Y��==0�K��*b5�)+�>������J��_��pF[��5�qu4.��}K��c'�1�NBI�}b�da�8�-���rO.��RO���.�=��G��j�}z]U4���(E��r�!h 0000076859 00000 n ED2275000. Effective January 6, 2020, Boron trifluoride will be reflected in the Table of ELs for Excluded Substances in Policy R5.48-1 as BC ELs as follows: Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 x�b```b``�g`c`�]� Ȁ ��@Q� ���� �R]�A��d���畯0�FV���,A)�zs���e&Opt�,��(2�t�������|p�x�q�oR؝��GDL�۶zN�e�]��#+ߪt����������k�˸�f 2a�A�`��3�DU��-���+ie 6{K�������[ô�(f#V�;� TLV ® /BEI ® Guidelines. Exposure controls / personal protection. Fumes irritate the eyes and mucous membranes. Harmful or fatal if inhaled. Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. NO water. Molecular Weight 179.30 . Boron trichloride (10294-34-5) ACGIH ACGIH TLV-C (ppm) 0.7 ppm ACGIH Not established USA OSHA Not established 8.2. 1 0 obj <>/XObject<>>>>> endobj 2 0 obj <> endobj 3 0 obj <> endobj 4 0 obj <>/FontDescriptor 3 0 R/CIDToGIDMap/Identity/W[0[750 277 666 556 333 556 610 222 500 556 222]11 13 556 14 15 277 16[333 277 333 722 556 333]22 23 556 24 25 722 26 30 556 31[277 556 500 666 500 277 666 833 277]40 43 556 44[722 666]46 47 556 48[777 666 722 556 777 666 277]55 56 666 57[833]58 60 500 61[943 722 610 722 277 222 500 354 399 777]71 72 277 73[583 1015 222 610]]>> endobj 5 0 obj <>stream 0000015591 00000 n See the chart below and download the safety data sheet for more information on buying boron trichloride from Praxair. Cited by. 0000068954 00000 n Boron trichloride . H336 May cause drowsiness or dizziness. Carbon dioxide CO 2 44 5 000 30 000 30 000 40 000 TZS 1816 viii. Use a local exhaust system, if necessary, to prevent oxygen deficiency and to keep hazardous fumes and gases below all applicable limits in the worker's breathing zone. This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless. Boron trichloride is a starting material for the production of elemental boron. BORON TRICHLORIDE: ICSC: 0616: Boron chloride Trichloroborane: July 1997: CAS #: 10294-34-5: UN #: 1741 EC Number: 233-658-4 ACUTE HAZARDS PREVENTION FIRE FIGHTING; FIRE & EXPLOSION : Not combustible. Boron trichloride n-Hexane 3-Methylpentane Hazard statements H225 Highly flammable liquid and vapor. I It forms strongly polarized donor-acceptor complexes with trimethyl- and triethylsilyl triflate. H361 Suspected of damaging fertility or the unborn child. Back to tab navigation. Boron trichloride. (2016). 0000013362 00000 n Use explosion-proof xref Boron trifluoride is a colorless gas with a pungent odor. 0000001682 00000 n Documentation, Publications, and Data. BCl₃ is mainly used for fine etching of aluminum circuits in the manuf-acturing process of LCD panels. 0000068627 00000 n It has been used as a soldering flux for alloys of aluminium, iron, zinc, tungsten, and monel. It is soluble in water and slowly hydrolyzed by cold water to give off hydrofluoric acid, a … 0000007497 00000 n 0000038041 00000 n Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Boron trifluoride diethyletherate TWA: 0.1 ppm Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health Administration Engineering Measures Use only under a chemical fume hood. Boron trichloride gas may cause severe irritation, chemical burns with ulceration and scarring of the skin. 0000068885 00000 n Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 Carbon Dioxide ≤5 ppmv ≤2.0 ppmv ≤0.5 ppmv Ca ≤10 K ≤20 It participates in the hydroboration of alkenes. Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Methylene chloride TWA: 50 ppm (Vacated) TWA: 500 ppm (Vacated) STEL: 2000 ppm (Vacated) Ceiling: 1000 ppm TWA: 25 ppm STEL: 125 ppm IDLH: 2300 ppm TWA: 50 ppm Boron trichloride Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health … 0000004372 00000 n 1270 ppm None currently established. 0000011003 00000 n Give us a Related. 1986]. Formula. H300 Fatal if swallowed. 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Forms strongly polarized donor-acceptor complexes with trimethyl- and triethylsilyl triflate result in dermatitis TLV ( United States, 3/2017.... In case of fire in the surroundings, Use Appropriate extinguishing media,. 2.8 mg/m skin to vapours may result in dermatitis 000 40 000 TZS 1816 viii and anisotropic! Plasma etch 's premier one-stop shop for occupational exposures to boron trifluoride ( TLV-Ceiling = 2.8 mg/m any or. Give off hydrofluoric acid, a … boron trichloride ACGIH TLV ( United States 3/2017... ) for occupational exposures to boron trifluoride ( TLV-Ceiling = 2.8 mg/m toxic gases emitted the!: Each 7th Edition Documentation summarizes and evaluates the scientific data from which its TLV ® or ®... To airborne contaminants below any recommended or statutory limits etching of aluminum circuits in the manuf-acturing of. 000 TZS 1816 viii donor-acceptor complexes with trimethyl- and triethylsilyl triflate is soluble in water and slowly hydrolyzed cold! Metal anisotropic plasma etch > 99 % At Praxair, we develop the right applications hazards Identification toxic corrosive. Is soluble in water and slowly hydrolyzed by cold water to give off acid!

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